CVD Furnaces
Product Information
It is to use plasma activity by encouraging the chemical reaction to occur at low temperature, CVD is called plasma enhancing chemical vapor deposition. Use of materials that comply with environmental protection laws and regulations (PECVD) (including the requirement of ISO14000), environmentally friendly.This machine complies with OHSMS18000 requirement, touching the machine is not harmful to human health
Product Information
It is to use plasma activity by encouraging the chemical reaction to occur at low temperature, CVD is called plasma enhancing chemical vapor deposition. Use of materials that comply with environmental protection laws and regulations (PECVD) (including the requirement of ISO14000), environmentally friendly.
This machine complies with OHSMS18000 requirement, touching the machine is not harmful to human health
Glow discharge in the plasma: High electron density: 109-1012cm3 Electron gas temperature is 10-100 times more common than the gas molecule.
A gas mixer tank installs a liquid drain valve. Stainless steel needle is installed on the left side, mixed gas input amount can be manually controlled